Chip package structure

ABSTRACT

A chip package structure is provided. The chip package structure includes a substrate having a first surface and a second surface opposite to the first surface. The chip package structure includes a first chip structure and a second chip structure over the first surface. The chip package structure includes a protective layer over the first surface and surrounding the first chip structure and the second chip structure. A portion of the protective layer is between the first chip structure and the second chip structure. The chip package structure includes a first anti-warpage bump over the second surface and extending across the portion of the protective layer. The chip package structure includes a conductive bump over the second surface and electrically connected to the first chip structure or the second chip structure. The first anti-warpage bump is wider than the conductive bump.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a Continuation of application Ser. No. 16/277,806,filed on Feb. 15, 2019, which claims the benefit of U.S. ProvisionalApplication No. 62/669,045, filed on May 9, 2018, the entirety of whichis incorporated by reference herein.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment. These semiconductor devices are fabricated bysequentially depositing insulating or dielectric layers, conductivelayers, and semiconductor layers over a semiconductor substrate, andpatterning the various material layers using lithography and etchingprocesses to form circuit components and elements on the semiconductorsubstrate.

The semiconductor industry continues to improve the integration densityof various electronic components (e.g., transistors, diodes, resistors,capacitors, etc.) by continual reductions in minimum feature size, whichallow more components to be integrated into a given area. These smallerelectronic components also use a smaller package that takes up less areaor has a lower height, in some applications.

New packaging technologies have been developed to improve the densityand functionality of semiconductor devices. These relatively new typesof packaging technologies for semiconductor devices face manufacturingchallenges.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1E are cross-sectional views of various stages of a process forforming a chip package structure, in accordance with some embodiments.

FIG. 2 is a bottom view of the chip package structure in FIG. 1E, inaccordance with some embodiments.

FIG. 3A is a cross-sectional view illustrating the chip packagestructure along a sectional line 3A-3A in FIG. 2, in accordance withsome embodiments.

FIG. 3B is a cross-sectional view illustrating the chip packagestructure along a sectional line 3B-3B in FIG. 2, in accordance withsome embodiments.

FIG. 4 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 5 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 6 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 7 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 8 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 9 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 10 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 11 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 12 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 13 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 14 is a bottom view of a chip package structure, in accordance withsome embodiments.

FIG. 15 is a cross-sectional view of a chip package structure, inaccordance with some embodiments.

FIG. 16 is a cross-sectional view of a chip package structure, inaccordance with some embodiments.

FIG. 17 is a cross-sectional view of a chip package structure, inaccordance with some embodiments.

FIG. 18 is a cross-sectional view of a chip package structure, inaccordance with some embodiments.

FIG. 19 is a cross-sectional view of a chip package structure, inaccordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Furthermore, spatially relative terms, such as “beneath,” “below,”“lower,” “above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Some embodiments of the disclosure are described. Additional operationscan be provided before, during, and/or after the stages described inthese embodiments. Some of the stages that are described can be replacedor eliminated for different embodiments. Additional features can beadded to the semiconductor device structure. Some of the featuresdescribed below can be replaced or eliminated for different embodiments.Although some embodiments are discussed with operations performed in aparticular order, these operations may be performed in another logicalorder.

This disclosure involves 3D packaging or 3DIC devices. Other featuresand processes may also be included. For example, testing structures maybe included to aid in the verification testing of the 3D packaging or3DIC devices. The testing structures may include, for example, test padsformed in a redistribution layer or on a substrate that allows thetesting of the 3D packaging or 3DIC, the use of probes and/or probecards, and the like. The verification testing may be performed onintermediate structures as well as the final structure. Additionally,the structures and methods disclosed herein may be used in conjunctionwith testing methodologies that incorporate intermediate verification ofknown good dies to increase the yield and decrease costs.

FIGS. 1A-1E are cross-sectional views of various stages of a process forforming a chip package structure, in accordance with some embodiments.As shown in FIG. 1A, a substrate 110 is provided, in accordance withsome embodiments. In some embodiments, the substrate 110 is a wafer. Thesubstrate 110 includes a semiconductor structure 111, conductive vias112, an insulating layer 113, a redistribution structure 114, andconductive pads 115, in accordance with some embodiments.

The semiconductor structure 111 has surfaces 111 a and 111 b, inaccordance with some embodiments. In some embodiments, the semiconductorstructure 111 is made of an elementary semiconductor material includingsilicon or germanium in a single crystal, polycrystal, or amorphousstructure.

In some other embodiments, the semiconductor structure 111 is made of acompound semiconductor (e.g., silicon carbide, gallium arsenide, galliumphosphide, indium phosphide, or indium arsenide), an alloy semiconductor(e.g., SiGe or GaAsP), or a combination thereof. The semiconductorstructure 111 may also include multi-layer semiconductors, semiconductoron insulator (SOI) (such as silicon on insulator or germanium oninsulator), or a combination thereof.

In some embodiments, the substrate 110 is an interposer wafer. Theconductive vias 112 are formed in the semiconductor structure 111, inaccordance with some embodiments. The conductive vias 112 may be formedto extend from the surface 111 a into the semiconductor structure 111.

The insulating layer 113 is formed over the semiconductor structure 111,in accordance with some embodiments. The insulating layer 113 is betweenthe conductive vias 112 and the semiconductor structure 111, inaccordance with some embodiments. The insulating layer 113 is configuredto electrically insulate the conductive vias 112 from the semiconductorstructure 111, in accordance with some embodiments. The insulating layer113 is made of an oxide-containing material such as silicon oxide, inaccordance with some embodiments. The insulating layer 113 is formedusing an oxidation process, a deposition process, or another suitableprocess.

In some other embodiments, the substrate 110 is a device wafer thatincludes active devices or circuits. The active devices may includetransistors (not shown) formed at the surface 111 a. The substrate 110may also include passive devices (not shown) formed in or over thesemiconductor structure 111, in accordance with some embodiments. Thepassive devices include resistors, capacitors, or other suitable passivedevices.

The redistribution structure 114 is formed over the semiconductorstructure 111, in accordance with some embodiments. The conductive pads115 are formed over the redistribution structure 114, in accordance withsome embodiments. The redistribution structure 114 includes a dielectriclayer 114 a, wiring layers 114 b, and conductive vias 114 c, inaccordance with some embodiments. The dielectric layer 114 a is formedover the surface 111 a, in accordance with some embodiments. The wiringlayers 114 b are formed in the dielectric layer 114 a, in accordancewith some embodiments.

As shown in FIG. 1A, the conductive vias 114 c are electricallyconnected between different wiring layers 114 b and between the wiringlayer 114 b and the conductive pads 115, in accordance with someembodiments. For the sake of simplicity, FIG. 1A only shows one of thewiring layers 114 b, in accordance with some embodiments. The conductivevias 112 are electrically connected to the conductive pads 115 throughthe wiring layers 114 b and the conductive vias 114 c, in accordancewith some embodiments.

As shown in FIG. 1A, the chip structures 120, 130, and 140 are bonded tothe substrate 110 through the conductive bumps 150 between the chipstructures 120, 130 and 140 and the substrate 110, in accordance withsome embodiments. The chip structure 120 or 130 includes a chip, such asa system on chip (SoC), in accordance with some embodiments. In someother embodiments, the chip structure 120 or 130 includes a chip packagestructure.

In some embodiments, the chip structure 140 includes multiplesemiconductor dies. As shown in FIG. 1A, the chip structure 140 includessemiconductor dies 141, 142, 143, and 144, in accordance with someembodiments. In some embodiments, the chip structure 140 includes amolding layer 145 that encapsulates and protects the semiconductor dies142, 143 and 144. The molding layer 145 may include an epoxy-based resinwith fillers dispersed therein. The fillers may include insulatingfibers, insulating particles, other suitable elements, or a combinationthereof.

In some embodiments, the semiconductor dies 142, 143 and 144 are memorydies. The memory dies may include memory devices such as static randomaccess memory (SRAM) devices, dynamic random access memory (DRAM)devices, other suitable devices, or a combination thereof. In someembodiments, the semiconductor die 141 is a control die that iselectrically connected to the memory dies (e.g., the semiconductor dies142, 143 and 144) stacked thereon. The chip structure 140 may functionas a high bandwidth memory (HBM).

Many variations and/or modifications can be made to embodiments of thedisclosure. In some embodiments, the chip structure 140 includes asingle semiconductor chip. The semiconductor chip may be a system onchip.

In some embodiments, conductive bonding structures 146 are formedbetween the semiconductor dies 141, 142, 143 and 144 to bond themtogether, as shown in FIG. 1A. In some embodiments, each of theconductive bonding structures 146 includes metal pillars and/or solderbumps.

In some embodiments, underfill layers 147 are formed between thesemiconductor dies 141, 142, 143 and 144 to surround and protect theconductive bonding structures 146. In some embodiments, the underfilllayer 147 includes an epoxy-based resin with fillers dispersed therein.The fillers may include insulating fibers, insulating particles, othersuitable elements, or a combination thereof.

In some embodiments, multiple conductive vias 148 are formed in thesemiconductor dies 141, 142, and 143, as shown in FIG. 1A. Eachconductive via 148 penetrates through one of the semiconductor dies 141,142, and 143 and is electrically connected to the conductive bondingstructures 146 thereunder and/or thereover. Electrical signals can betransmitted between these vertically stacked semiconductor dies 141,142, 143 and 144 through the conductive vias 148.

As shown in FIG. 1A, an underfill layer 160 is formed into a gap G1between the substrate 110 and each of the chip structures 120, 130, and140, in accordance with some embodiments. As shown in FIG. 1A, a gap G2between the chip structures 130 and 140 is filled with a portion 162 ofthe underfill layer 160, in accordance with some embodiments.

As shown in FIG. 1A, a gap G3 between the chip structures 120 and 130 isfilled with the underfill layer 160, in accordance with someembodiments. The underfill layer 160 surrounds the chip structures 120,130, and 140, in accordance with some embodiments. The underfill layer160 is referred to as a protective layer, in accordance with someembodiments. The underfill layer 160 includes a polymer material, inaccordance with some embodiments

As shown in FIG. 1A, a molding layer 170 is formed over the substrate110 to surround the chip structures 120, 130 and 140 and the conductivebumps 150, in accordance with some embodiments. The molding layer 170includes a polymer material, in accordance with some embodiments.

As shown in FIG. 1B, a lower portion of the semiconductor structure 111is removed, in accordance with some embodiments. The removal processincludes a chemical mechanical polishing process, in accordance withsome embodiments. After the removal process, the conductive vias 112 andthe insulating layer 113 are exposed, in accordance with someembodiments.

The conductive vias 112 and the insulating layer 113 pass through thesemiconductor structure 111, in accordance with some embodiments. Theconductive vias 112 are also referred to as through-substrate vias orthrough-silicon vias when the semiconductor structure 111 is a siliconsubstrate, in accordance with some embodiments.

As shown in FIG. 1C, the semiconductor structure 111 is flipped upsidedown, in accordance with some embodiments. As shown in FIG. 1C, aninsulating layer 116 is formed over the surface 111 b, in accordancewith some embodiments. The insulating layer 116 is configured toelectrically insulate wiring layers subsequently formed thereon from thesemiconductor structure 111, in accordance with some embodiments. Theinsulating layer 116 is made of an oxide-containing material such assilicon oxide, in accordance with some embodiments. The insulating layer116 is formed using an oxidation process, a deposition process, oranother suitable process.

In some embodiments, a redistribution structure 117 is formed over thesurface 111 b of the semiconductor structure 111, in accordance withsome embodiments. The redistribution structure 117 includes a dielectriclayer 117 a, wiring layers 117 b, and conductive vias 117 c, inaccordance with some embodiments. The wiring layers 117 b are formed inthe dielectric layer 117 a, in accordance with some embodiments.

As shown in FIG. 1C, conductive pads 118 a and 118 b are formed over theredistribution structure 117, in accordance with some embodiments. Theconductive pad 118 b is wider than the conductive pads 118 a, inaccordance with some embodiments. The conductive pad 118 b is right overthe gap G2 and the portion 162 of the underfill layer 160 in the gap G2,in accordance with some embodiments. The conductive pad 118 b extendsacross the gap G2 and the portion 162, in accordance with someembodiments. A width W1 of the conductive pad 118 b is greater than adistance D1 between the chip structures 130 and 140, in accordance withsome embodiments.

The conductive vias 117 c are electrically connected between differentwiring layers 117 b and between the wiring layer 117 b and theconductive pads 118 a and 118 b, in accordance with some embodiments.For the sake of simplicity, FIG. 1C only shows one of the wiring layers117 b, in accordance with some embodiments. The conductive vias 112 areelectrically connected to the conductive pads 118 a and 118 b throughthe wiring layers 117 b and the conductive vias 117 c, in accordancewith some embodiments.

As shown in FIG. 1C, buffer rings 119 are formed over the conductivepads 118 a and 118 b, in accordance with some embodiments. The bufferring 119 has an opening 119 a exposing the conductive pads 118 a or 118b thereunder, in accordance with some embodiments. The buffer rings 119are configured to buffer the stress between bumps subsequently formedthereover and the substrate 110, in accordance with some embodiments.

The buffer rings 119 are made of an elastic material such as a polymermaterial (e.g., polyimide), in accordance with some embodiments. In someother embodiments (not shown), the buffer rings 119 are replaced with abuffer layer having openings exposing the conductive pads 118 a and 118b.

As shown in FIG. 1C, a seed layer 10 is formed over the redistributionstructure 117, the buffer rings 119, and the conductive pads 118 a and118 b, in accordance with some embodiments. The materials of the seedlayer 10 may include copper or copper alloys. The materials of the seedlayer 10 may include other metals, such as silver, gold, aluminum, andcombinations thereof.

As shown in FIG. 1C, a mask layer 180 is formed over the seed layer 10,in accordance with some embodiments. The mask layer 180 has openings 182exposing the seed layer 10 over the conductive pads 118 a and the bufferrings 119 adjacent to the conductive pads 118 a, in accordance with someembodiments. The mask layer 180 has openings 184 exposing the seed layer10 over the conductive pads 118 b and the buffer rings 119 adjacent tothe conductive pads 118 b, in accordance with some embodiments. Theopening 184 is wider than the opening 182, in accordance with someembodiments. The mask layer 180 is made of a polymer material such as aphotoresist material, in accordance with some embodiments.

As shown in FIG. 1D, conductive bumps 192 are formed in the openings 182and over the conductive pads 118 a, in accordance with some embodiments.As shown in FIG. 1D, anti-warpage bumps 194 are formed in the openings184 and over the conductive pads 118 b, in accordance with someembodiments. Each anti-warpage bump 194 extends across the gap G2between the chip structures 130 and 140, in accordance with someembodiments.

The anti-warpage bumps 194 extend across the portion 162 of theunderfill layer 160 in the gap G2, in accordance with some embodiments.The anti-warpage bumps 194 are configured to reduce the warpage of thesubstrate 110, in accordance with some embodiments.

As shown in FIG. 1D, a width W2 of the anti-warpage bump 194 is greaterthan the distance D1 between the chip structures 130 and 140, inaccordance with some embodiments. The width W2 of the anti-warpage bump194 is greater than a width W3 of the conductive bump 192, in accordancewith some embodiments. In some embodiments, the anti-warpage bumps 194are electrically connected to the chip structures 120, 130, and/or 140through the substrate 110. In some other embodiments, the anti-warpagebumps 194 are electrically insulated from the chip structures 120, 130,and/or 140.

In some embodiments, the anti-warpage bump 194 is thinner than theconductive bump 192, in accordance with some embodiments. The maximumthickness T1 of the anti-warpage bump 194 is less than the maximumthickness T2 of the conductive bump 192, in accordance with someembodiments. In some embodiments, the maximum thickness T1 of theanti-warpage bump 194 is equal to the maximum thickness T2 of theconductive bump 192.

In some embodiments, a ratio of the maximum thickness T1 to the maximumthickness T2 ranges from about 0.8 to about 1. The conductive bump 192and the anti-warpage bumps 194 are made of a conductive material such ascopper (Cu), aluminum (Al), tungsten (W), cobalt (Co), or nickel (Ni),in accordance with some embodiments. The conductive bumps 192 and theanti-warpage bumps 194 are formed using a plating process such as anelectroplating process, in accordance with some embodiments.

As shown in FIG. 1D, a solder layer 212 is formed over the conductivebumps 192, in accordance with some embodiments. As shown in FIG. 1D, asolder layer 214 is formed over the anti-warpage bumps 194, inaccordance with some embodiments. The solder layer 214 is thinner thanthe solder layer 212, in accordance with some embodiments. That is, athickness T3 of the solder layer 214 is less than a thickness T4 of thesolder layer 212, in accordance with some embodiments. In some otherembodiments, the thickness T3 is equal to the thickness T4.

In some embodiments, a ratio of the thickness T3 to the thickness T4ranges from about 0.8 to about 1. The solder layers 212 and 214 are madeof tin (Sn) or another suitable conductive material with a melting pointlower than that of the anti-warpage bumps 194, in accordance with someembodiments. The solder layers 212 and 214 are formed using a platingprocess such as an electroplating process, in accordance with someembodiments.

As shown in FIG. 1E, the mask layer 180 is removed, in accordance withsome embodiments. As shown in FIG. 1E, the seed layer 10 originallycovered by the mask layer 180 is removed, in accordance with someembodiments. The seed layer 10 is removed using an etching process, inaccordance with some embodiments. As shown in FIG. 1E, a reflow processis performed over the solder layers 212 and 214 to convert the solderlayers 212 and 214 into solder balls 212 a and 214 a, in accordance withsome embodiments.

In some embodiments, a maximum thickness T5 of the solder ball 214 a isless than a maximum thickness T6 of the solder ball 212 a. In some otherembodiments, the thickness T5 is equal to the thickness T6. In someembodiments, a ratio of the thickness T5 to the thickness T6 ranges fromabout 0.8 to about 1.

In some embodiments, a combination structure of the chip structures 120,130 and 140, the underfill layer 160, and the molding layer 170 has afirst coefficient of thermal expansion. In some embodiments, thesubstrate 110 has a second coefficient of thermal expansion. In someembodiments, the anti-warpage bumps 194 have a third coefficient ofthermal expansion.

The first coefficient of thermal expansion is greater than the secondcoefficient of thermal expansion, in accordance with some embodiments.The third coefficient of thermal expansion is greater than the secondcoefficient of thermal expansion, in accordance with some embodiments.Therefore, the anti-warpage bumps 194 with greater coefficient ofthermal expansion (than that of the substrate 110) may reduce thewarpage of the substrate 110 caused by the combination structure withgreater coefficient of thermal expansion (than that of the substrate110).

The first coefficient of thermal expansion ranges from about 100 ppm/°C. to about 140 ppm/° C., in accordance with some embodiments. TheYoung's Modulus of the combination structure ranges from about 4 Gpa toabout 8 Gpa, in accordance with some embodiments. The second coefficientof thermal expansion ranges from about 1 ppm/° C. to about 4 ppm/° C.,in accordance with some embodiments. The Young's Modulus of thesubstrate 110 ranges from about 170 Gpa to about 210 Gpa, in accordancewith some embodiments. The third coefficient of thermal expansion rangesfrom about 14 ppm/° C. to about 21 ppm/° C., in accordance with someembodiments. The Young's Modulus of the anti-warpage bumps 194 rangesfrom about 110 Gpa to about 150 Gpa, in accordance with someembodiments.

The distance D1 between the chip structures 130 and 140 ranges fromabout 20 g m to about 200 μm, in accordance with some embodiments. Thedistance D1 ranges from about 30 μm to about 120 μm, in accordance withsome embodiments. In some embodiments, a ratio of the width W2 of theanti-warpage bumps 194 to the distance D1 ranges from about 3 to about50. In some embodiments, a ratio of the width W2 of the anti-warpagebumps 194 to the width W3 of the conductive bump 192 ranges from about 2to about 10.

The melting point (or the melting temperature) of the anti-warpage bumps194 is higher than that of the solder layer 214 (as shown in FIG. 1D),in accordance with some embodiments. Therefore, the anti-warpage bump194 may maintain its shape after the reflow process is performed overthe solder layer 214.

In some embodiments, the anti-warpage bumps 194 are electricallyconnected to the chip structures 120, 130 and 140, the substrate 110,the conductive bumps 192, and/or the solder balls 212 a. In some otherembodiments, the anti-warpage bumps 194 are not electrically connectedto the chip structures 120, 130 and 140, the substrate 110, theconductive bumps 192, and/or the solder balls 212 a.

As shown in FIGS. 1D and 1E, a cutting process is performed to cutthrough the substrate 110 and the molding layer 170 along predeterminedscribe lines SC to form chip packages 100, in accordance with someembodiments. For the sake of simplicity, FIG. 1E only shows one of thechip packages 100, in accordance with some embodiments. As shown in FIG.1E, the chip package 100 is flipped upside down, in accordance with someembodiments.

FIG. 2 is a bottom view of the chip package structure 100 in FIG. 1E, inaccordance with some embodiments. FIG. 1E is a cross-sectional viewillustrating the chip package structure 100 along a sectional line 1E-1Ein FIG. 2, in accordance with some embodiments.

As shown in FIGS. 1E and 2, the solder balls 214 a and the anti-warpagebumps 194 have an oblique oval shape, in accordance with someembodiments. The solder balls 214 a (or the anti-warpage bumps 194) withthe oblique oval shape has a long axis length A1 and a short axis lengthB1, in accordance with some embodiments. In some embodiments, a ratio ofthe long axis length A1 to the short axis length B1 ranges from about1.5 to about 5. In some embodiments, a ratio of the long axis length A1to the distance D1 ranges from about 3 to about 10.

FIG. 3A is a cross-sectional view illustrating the chip packagestructure 100 along a sectional line 3A-3A in FIG. 2, in accordance withsome embodiments. As shown in FIGS. 2 and 3A, the chip package structure100 further includes anti-warpage bumps 196 and solder balls 216 a, inaccordance with some embodiments. The anti-warpage bumps 196 and thesolder balls 216 a are under corners 132, 134, 149 a, and 149 b of thechip structures 130 and 140, in accordance with some embodiments. Theanti-warpage bumps 196 (or the solder balls 216 a) extend across the gapG2 between the chip structures 130 and 140, in accordance with someembodiments.

The anti-warpage bumps 194 and 196 are arranged in a straight line, inaccordance with some embodiments. The straight line is parallel to edges136 and 146 of the chip structures 130 and 140, in accordance with someembodiments. The anti-warpage bumps 196 have a round shape, inaccordance with some embodiments.

Since the layout density of the conductive bumps 192 in the peripheryregion of the substrate 110 is less than the layout density of theconductive bumps 192 in the central region of the substrate 110, theperiphery region provides more space than the central region. Therefore,the anti-warpage bump 196 formed in the periphery region is larger thanthe anti-warpage bump 194 formed in the central region, in accordancewith some embodiments.

The anti-warpage bump 196 is wider than the anti-warpage bump 194, inaccordance with some embodiments. That is, the width W4 of theanti-warpage bump 196 (or the solder ball 216 a) is greater than thelong axis length A1, in accordance with some embodiments. In someembodiments, a ratio of the width W4 to the long axis length A1 rangesfrom about 1.1 to about 10. In some embodiments, the ratio of the widthW4 to the long axis length A1 ranges from about 4 to about 10. In someembodiments, the width W4 is greater than the long axis length A1. Insome embodiments, a ratio of the width W4 to the short axis length B1ranges from about 10 to about 18. The width W4 ranges from about 1800 μmto about 2600 μm, in accordance with some embodiments. The anti-warpagebump 196 is wider than the conductive bump 192, in accordance with someembodiments.

FIG. 3B is a cross-sectional view illustrating the chip packagestructure 100 along a sectional line 3B-3B in FIG. 2, in accordance withsome embodiments. As shown in FIGS. 2 and 3B, the anti-warpage bump 196is thinner than the anti-warpage bump 194, in accordance with someembodiments. The solder ball 216 a is thinner than the solder ball 214a, in accordance with some embodiments.

As shown in FIG. 2, the chip structure 120 or 130 is wider than the chipstructure 140, in accordance with some embodiments. The chip structures120 and 130 have the same size (width and/or length), in accordance withsome embodiments.

FIG. 4 is a bottom view of a chip package structure 400, in accordancewith some embodiments. As shown in FIG. 4, the chip package structure400 is similar to the chip package structure 100 of FIG. 2, except thatthe anti-warpage bumps 196 and the solder balls 216 a of the chippackage structure 400 have an oblique oval shape, in accordance withsome embodiments.

FIG. 5 is a bottom view of a chip package structure 500, in accordancewith some embodiments. As shown in FIG. 5, the chip package structure500 is similar to the chip package structure 400 of FIG. 4, except thatthe anti-warpage bumps 194 and 196 and the solder balls 214 a and 216 aof the chip package structure 500 have a horizontal oval shape, inaccordance with some embodiments.

The anti-warpage bump 196 has a long axis length A2 and a short axislength B2, in accordance with some embodiments. The long axis length A2ranges from about 1800 μm to about 2600 μm, in accordance with someembodiments. The short axis length B2 ranges from about 550 μm to about950 μm, in accordance with some embodiments.

The long axes of the anti-warpage bumps 194 and 196 are parallel to eachother, in accordance with some embodiments. The long axes of theanti-warpage bumps 194 and 196 are parallel to edges 138 and 148 of thechip structures 130 and 140, in accordance with some embodiments.

FIG. 6 is a bottom view of a chip package structure 600, in accordancewith some embodiments. As shown in FIG. 6, the chip package structure600 is similar to the chip package structure 500 of FIG. 5, except thatthe anti-warpage bumps 194 and 196 and the solder balls 214 a and 216 aof the chip package structure 600 have a horizontal rectangular shape,in accordance with some embodiments.

The anti-warpage bump 196 has a width W5 and a length L1, in accordancewith some embodiments. The width W5 ranges from about 1800 μm to about2600 μm, in accordance with some embodiments. The length L1 ranges fromabout 550 μm to about 950 μm, in accordance with some embodiments.

FIG. 7 is a bottom view of a chip package structure 700, in accordancewith some embodiments. As shown in FIG. 7, the chip package structure700 is similar to the chip package structure 600 of FIG. 6, except thatthe anti-warpage bumps 194 and 196 and the solder balls 214 a and 216 aof the chip package structure 700 have an oblique rectangular shape, inaccordance with some embodiments.

FIG. 8 is a bottom view of a chip package structure 800, in accordancewith some embodiments. As shown in FIG. 8, the chip package structure800 is similar to the chip package structure 600 of FIG. 6, except thatthe anti-warpage bumps 194 and 196 and the solder balls 214 a and 216 aof the chip package structure 800 have an H-shape, in accordance withsome embodiments.

FIG. 9 is a bottom view of a chip package structure 900, in accordancewith some embodiments. As shown in FIG. 9, the chip package structure900 is similar to the chip package structure 600 of FIG. 6, except thatthe anti-warpage bumps 194 and 196 and the solder balls 214 a and 216 aof the chip package structure 900 have a I-shape, in accordance withsome embodiments.

FIG. 10 is a bottom view of a chip package structure 1000, in accordancewith some embodiments. As shown in FIG. 10, the chip package structure1000 is similar to the chip package structure 100 of FIG. 2, except thatthe anti-warpage bumps 194, the solder balls 212 a and 214 a, theconductive bumps 192 of the chip package structure 1000 have an obliquestripe shape, in accordance with some embodiments.

FIG. 11 is a bottom view of a chip package structure 1100, in accordancewith some embodiments. As shown in FIG. 11, the chip package structure1100 is similar to the chip package structure 100 of FIG. 2, except thatthe anti-warpage bumps 196 and the solder balls 216 a of the chippackage structure 1100 have a bar shape or a strip shape, in accordancewith some embodiments. The anti-warpage bumps 196 and the solder balls216 a extend across the chip structures 120, 130, and 140, in accordancewith some embodiments.

FIG. 12 is a bottom view of a chip package structure 1200, in accordancewith some embodiments. As shown in FIG. 12, the chip package structure1200 is similar to the chip package structure 100 of FIG. 2, except thatthe anti-warpage bump 196 and the solder ball 216 a of the chip packagestructure 1200 have a ring shape, in accordance with some embodiments.The anti-warpage bump 196 and the solder ball 216 a surround the chipstructures 120, 130, and 140, in accordance with some embodiments.

FIG. 13 is a bottom view of a chip package structure 1300, in accordancewith some embodiments. As shown in FIG. 13, the chip package structure1300 is similar to the chip package structure 100 of FIG. 2, except thatthe chip package structure 1300 further includes protection bumps 198and solder balls 218 a over corners C1, C2, C3, and C4 of the substrate110, in accordance with some embodiments.

The protection bumps 198 and the solder balls 218 a have an L-shape, inaccordance with some embodiments. Since the stress may concentrate atthe corners C1, C2, C3, and C4 during the cutting process of FIGS. 1Dand 1E, the formation of the protection bumps 198 and the solder balls218 a may strengthen the substrate 110.

FIG. 14 is a bottom view of a chip package structure 1400, in accordancewith some embodiments. As shown in FIG. 14, the chip package structure1400 is similar to the chip package structure 100 of FIG. 2, except thateach anti-warpage bump 196 and each solder ball 216 a of the chippackage structure 1400 are only under the corner 132 or 134 of the chipstructure 130, in accordance with some embodiments. The anti-warpagebump 196 and the solder ball 216 a of the chip package structure 1400are not under the corners 149 a and 149 b of the chip structures 140, inaccordance with some embodiments.

FIG. 15 is a cross-sectional view of a chip package structure 1500, inaccordance with some embodiments. As shown in FIG. 15, the chip packagestructure 1500 is similar to the chip package structure 100 of FIG. 1E,except that the chip package structure 1500 further includesanti-warpage bumps 1510, in accordance with some embodiments. Eachanti-warpage bump 1510 is between the chip structure 130 and thesubstrate 110, between the portion 162 of the underfill layer 160 andthe substrate 110, and between the chip structure 140 and the substrate110, in accordance with some embodiments.

The anti-warpage bump 1510 extends from the chip structure 130 to thechip structure 140, in accordance with some embodiments. Theanti-warpage bump 1510 extends across the portion 162 of the underfilllayer 160 and the gap G2 between the chip structures 130 and 140, inaccordance with some embodiments. The anti-warpage bump 1510 is rightover the anti-warpage bump 194 and the solder ball 214 a, in accordancewith some embodiments. The anti-warpage bumps 1510 are electricallyconnected to the chip structures 120, 130, and/or 140, in accordancewith some embodiments.

The anti-warpage bumps 1510 have a shape the same as or similar to thatof the anti-warpage bumps 194, in accordance with some embodiments. Theanti-warpage bumps 1510 have a size the same as or similar to that ofthe anti-warpage bumps 194, in accordance with some embodiments.

FIG. 16 is a cross-sectional view of a chip package structure, inaccordance with some embodiments. As shown FIG. 16, the chip packagestructure 1500 of FIG. 15 is bonded to a substrate 1610, in accordancewith some embodiments. After bonding the chip package structure 1500 tothe substrate 1610, the chip package structure 1500 may be slightlywarped along the gap G2 between the chip structures 130 and 140. Theanti-warpage bumps 194 and 1510 and the substrate 110 may be slightlywarped, in accordance with some embodiments. The substrate 1610 may be awiring substrate or an interposer substrate.

FIG. 17 is a cross-sectional view of a chip package structure 1700, inaccordance with some embodiments. As shown FIG. 17, the chip packagestructure 1700 is similar to the chip package structure 100 of FIG. 1E,except that the chip package structure 1700 does not include theunderfill layer 160, in accordance with some embodiments.

The molding layer 170 surrounds the chip structures 120, 130, and 140,in accordance with some embodiments. The molding layer 170 is filledinto the gap G1 (between the substrate 110 and each of the chipstructures 120, 130, and 140), the gap G2 (between the chip structures130 and 140), and the gap G3 (between the chip structures 120 and 130),in accordance with some embodiments.

The molding layer 170 is referred to as a protective layer, inaccordance with some embodiments. The anti-warpage bumps 194 and thesolder balls 214 a extend across the portion 172 of the molding layer170 in the gap G2, in accordance with some embodiments.

FIG. 18 is a cross-sectional view of a chip package structure 1800, inaccordance with some embodiments. As shown FIG. 18, the chip packagestructure 1800 is similar to the chip package structure 100 of FIG. 1E,except that the dielectric layer 117 a of the redistribution structure117 of the chip package structure 1800 has through holes 117 r, inaccordance with some embodiments.

The through holes 117 r partially expose the insulating layer 116, inaccordance with some embodiments. The through holes 117 r are formedafter forming the dielectric layer 117 a and before forming the seedlayer 10, in accordance with some embodiments. The seed layer 10 isformed over the bottom surface and the inner walls of the through holes117 r, in accordance with some embodiments. The anti-warpage bumps 194are formed in and over the through holes 117 r, in accordance with someembodiments. The solder balls 214 a are formed over the anti-warpagebumps 194, in accordance with some embodiments.

Since the anti-warpage bumps 194 are connected to the semiconductorstructure 111 without through the dielectric layer 117 a, theanti-warpage bumps 194 reduce the warpage of the substrate 110 moreeffectively, in accordance with some embodiments.

FIG. 19 is a cross-sectional view of a chip package structure 1900, inaccordance with some embodiments. As shown FIG. 19, the chip packagestructure 1900 is similar to the chip package structure 100 of FIG. 1E,except that the chip package structure 1900 does not include theredistribution structure 117 and the conductive pads 118 a and 118 b ofthe chip package structure 100 of FIG. 1E, in accordance with someembodiments. The buffer rings 119 and the seed layer 10 are directlyformed over the insulating layer 116, in accordance with someembodiments.

In accordance with some embodiments, chip package structures areprovided. The chip package structure includes anti-warpage bumps under agap between chip structures to reduce the warpage of a chip packagestructure including the anti-warpage bumps and the chip structures.

In accordance with some embodiments, a chip package structure isprovided. The chip package structure includes a substrate having a firstsurface and a second surface opposite to the first surface. The chippackage structure includes a first chip structure and a second chipstructure over the first surface. The chip package structure includes aprotective layer over the first surface and surrounding the first chipstructure and the second chip structure. A portion of the protectivelayer is between the first chip structure and the second chip structure.The chip package structure includes a first anti-warpage bump over thesecond surface and extending across the portion of the protective layer.The chip package structure includes a conductive bump over the secondsurface and electrically connected to the first chip structure or thesecond chip structure. The first anti-warpage bump is wider than theconductive bump.

In accordance with some embodiments, a chip package structure isprovided. The chip package structure includes a substrate having a firstsurface and a second surface opposite to the first surface. The chippackage structure includes a first chip structure and a second chipstructure over the first surface. The chip package structure includes aprotective layer over the first surface and surrounding the first chipstructure and the second chip structure. A first portion of theprotective layer is between the first chip structure and the second chipstructure. The chip package structure includes a first anti-warpage bumpover the second surface and under a first corner of the first chipstructure and a second portion of the protective layer adjacent to thefirst portion. The first corner is adjacent to the second chipstructure. The chip package structure includes a conductive bump overthe second surface and electrically connected to the first chipstructure or the second chip structure. The first anti-warpage bump iswider than the conductive bump.

In accordance with some embodiments, a chip package structure isprovided. The chip package structure includes a substrate having a firstsurface and a second surface opposite to the first surface. The chippackage structure includes a first chip structure and a second chipstructure over the first surface. The chip package structure includes aprotective layer over the first surface and surrounding the first chipstructure and the second chip structure. A portion of the protectivelayer is between the first chip structure and the second chip structure.The chip package structure includes a first anti-warpage bump over thesecond surface and extending across the portion of the protective layer.The chip package structure includes a conductive bump over the secondsurface and electrically connected to the first chip structure or thesecond chip structure. The first anti-warpage bump is wider than theconductive bump. The chip package structure includes a secondanti-warpage bump between the first chip structure and the substrate,between the portion of the protective layer and the substrate, andbetween the second chip structure and the substrate.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A chip package structure, comprising: a substratehaving a first surface and a second surface opposite to the firstsurface; a first chip structure and a second chip structure over thefirst surface; a protective layer over the first surface and surroundingthe first chip structure and the second chip structure, wherein aportion of the protective layer is between the first chip structure andthe second chip structure; a first anti-warpage bump over the secondsurface and extending across the portion of the protective layer; and aconductive bump over the second surface and electrically connected tothe first chip structure or the second chip structure, wherein the firstanti-warpage bump is wider than the conductive bump, and wherein thefirst anti-warpage bump and the conductive bump are exposed.
 2. The chippackage structure as claimed in claim 1, wherein a width of the firstanti-warpage bump is greater than a distance between the first chipstructure and the second chip structure.
 3. The chip package structureas claimed in claim 1, wherein the first anti-warpage bump is thinnerthan the conductive bump.
 4. The chip package structure as claimed inclaim 1, wherein the first anti-warpage bump is electrically connectedto the first chip structure or the second chip structure.
 5. The chippackage structure as claimed in claim 1, further comprising: a secondanti-warpage bump over the second surface and under a corner of thefirst chip structure, wherein the corner is adjacent to the second chipstructure, and the second anti-warpage bump is wider than the conductivebump.
 6. The chip package structure as claimed in claim 5, wherein thesecond anti-warpage bump is wider than the first anti-warpage bump. 7.The chip package structure as claimed in claim 5, wherein the secondanti-warpage bump has a rectangular shape, an oval shape, a round shape,an H-shape, or a I-shape.
 8. The chip package structure as claimed inclaim 5, wherein the second anti-warpage bump has a ring shape, and thesecond anti-warpage bump surrounds the first chip structure, the secondchip structure, the first anti-warpage bump, and the conductive bump. 9.The chip package structure as claimed in claim 1, wherein the firstanti-warpage bump has a rectangular shape, an oval shape, a round shape,an H-shape, or a I-shape.
 10. The chip package structure as claimed inclaim 1, further comprising: a first solder layer over the firstanti-warpage bump; and a second solder layer over the conductive bump,wherein the first solder layer is thinner than the second solder layer.11. The chip package structure as claimed in claim 1, furthercomprising: a protection bump over the second surface and located over acorner of the substrate, wherein the protection bump has an L-shape. 12.A chip package structure, comprising: a substrate having a first surfaceand a second surface opposite to the first surface; a first chipstructure and a second chip structure over the first surface; aprotective layer over the first surface and surrounding the first chipstructure and the second chip structure, wherein a first portion of theprotective layer is between the first chip structure and the second chipstructure; a first anti-warpage bump over the second surface and under afirst corner of the first chip structure and a second portion of theprotective layer adjacent to the first portion, wherein the first corneris adjacent to the second chip structure; and a conductive bump over thesecond surface and electrically connected to the first chip structure orthe second chip structure, wherein the first anti-warpage bump is widerthan the conductive bump, and wherein the first anti-warpage bump andthe conductive bump are exposed.
 13. The chip package structure asclaimed in claim 12, wherein the first anti-warpage bump is furtherunder a second corner of the second chip structure, and the firstanti-warpage bump extends across the first portion of the protectivelayer.
 14. The chip package structure as claimed in claim 12, furthercomprising: a second anti-warpage bump over the second surface andextending across the portion of the protective layer, wherein the firstanti-warpage bump is wider than the second anti-warpage bump, and thesecond anti-warpage bump is wider than the conductive bump.
 15. The chippackage structure as claimed in claim 14, further comprising: a thirdanti-warpage bump over the second surface and under a second corner ofthe first chip structure, wherein the third anti-warpage bump is widerthan the second anti-warpage bump, and the first anti-warpage bump, thesecond anti-warpage bump, and the third anti-warpage bump are arrangedin a straight line.
 16. The chip package structure as claimed in claim15, wherein the first anti-warpage bump, the second anti-warpage bump,and the third anti-warpage bump are under a same edge of the first chipstructure.
 17. A chip package structure, comprising: a substrate havinga first surface and a second surface opposite to the first surface; afirst chip structure and a second chip structure over the first surface;a protective layer over the first surface and surrounding the first chipstructure and the second chip structure, wherein a portion of theprotective layer is between the first chip structure and the second chipstructure; a first anti-warpage bump over the second surface andextending across the portion of the protective layer; a conductive bumpover the second surface and electrically connected to the first chipstructure or the second chip structure, wherein the first anti-warpagebump is wider than the conductive bump, and wherein the firstanti-warpage bump and the conductive bump are exposed; and a secondanti-warpage bump interposed between the first chip structure and thesubstrate, between the portion of the protective layer and thesubstrate, and between the second chip structure and the substrate. 18.The chip package structure as claimed in claim 17, wherein the secondanti-warpage bump extends across the portion of the protective layer anda gap between the first chip structure and the second chip structure.19. The chip package structure as claimed in claim 17, wherein thesecond anti-warpage bump is over the first anti-warpage bump.
 20. Thechip package structure as claimed in claim 17, wherein the secondanti-warpage bump is electrically connected to the first chip structureand the second chip structure.